OVERVIEW
Adaptive pressure controller (APC) board for TEL Unity tools, directly replacing PB-6 board of 650PB-26PM-AAM3.
KEY FEATURES
- The controller is used to directly replace the ADAPTIVE PRESSURE CONTROLLER (APC) produced by the VAT, used in the TEL UNITY etching tools.
- Original model: PB-6 (model number: 650PB-26PM-AAM3).
- Interface: VME64 standard bus.
- A new generation of component design is adopted, which greatly reduces the power consumption of the circuit board and improves the reliability of operation.
- No battery cell design completely eliminates circuit board corrosion and associated problems caused by battery leakage.
MODEL
ADSB-PB6+
APPLICATIONS
TEL Unity tools
Contact
*Note:Brands and trademarks such as LAM Research, Applied Materials, Novellus, Kla-Tencor, Hitachi, Nikon, Gasonics, TEL, Axcelis, Fusion, ASML belong to OEMs.
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