OVERVIEW
High-precision, high-stability high voltage power supply for driving electron gun, used to directly replace the dedicated high voltage power unit used in HITACHI CD-SEM tools,such as part No. 567-5101, 560-6590, 569-6592. We are working on hardware and software extensions for CG4000,CG5000,CG6300 tools and will release them soon.
KEY FEATURES & HIGHLIGHTS
- ADSP-HV80 power supply is a high-precision, high-stability, low-temperature drift, multi-channel high-voltage output, and a high-voltage power supply with filament heating driver specially designed for the drive of HITACHI CD-SEM scanning electron microscope electron gun.
- The ADSP-HV80 power supply has the same power input interface, LINK interface, serial communication interface and communication protocol, high-voltage output interface, high-voltage cable and high-voltage plug as the original HVPS. It can be directly used to replace all models of HITACHI’s original CD-SEM dedicated HVPS without any modification.
- We use a new design concept and adopt a new generation of high-precision, compact modular high-voltage unit, which makes the ADSP-HV80 high-voltage power supply reduced by a quarter of the volume and half of the weight compared to Hitachi's original HVPS. The power consumption and heat generation of this unit have been drastically reduced by about 40%.
- More importantly, we designed the new HVPS with a wider high-voltage output range, and built-in a variety of HITACHI original HVPS models of V1/V2 characteristic curve library, the user only needs to set one parameter to change The high-voltage output value range and characteristics of the HVPS, then it can be applied to all different types of HITACHI CD-SEM machines, such as S-8820, S-8840, S-9200, S-9220, S-9260, S-9300, S- 9380 and other models.
APPLICATIONS
All HITACHI CD-SEM S-88XX S-92XX S-93XX series tools, including S-8820, S-8840, S-9220, S-9260, S-9300, S-9380
SPECIFICATIONS
- Model: ADSP-HV80+
- Power Input Voltage: AC85-265V,1Φ,+15%/-20%, 50/60Hz
- Power Input Interface: Three-pin plug, the same as the original HITACHI
- High Voltage Outputs: V0:0- -3KV,1000μA Max / V1:0- +3KV,1000μA Max / V2:0- +6KV,670μA Max / Vs:0- -4KV,1000μA Max
- HV Outputs Accuracy: After warm-up,<±0.02% of settings
- HV Outputs Ripple: <25MV (p-p)
- HV Outputs Temperature Coefficient: <0.01%/℃
- HV Outputs Protection: Overload and short circuit protected
- Filament Output: DC 0-3A,Constant current Mode
- Accuracy of Filament Current: After warm-up,<±0.2% of settings
- Communication Interface: Opto-isolated serial port RS232,DB25F
- Communication Protocol: HITACHI CD-SEM customized, compatible with Hitachi S88XX/92XX/93XX series models of CD-SEM tools
- Displays: V0,V1,V2,VS,IF,Ie values
IP RANGE,IP CONTROL Instruction execution status
Key locked
Warmup in process
Outputs start and stop
Ie and If over current,vacuum error
The setting corresponds to the model information of HITACHI CD-SEM tools
Filament heating time accumulation (hours)
- Protections: If over current more than 3A / Ie over current more than 511μA / Vacuum error
- Supported HITACHI CD-SEM tool models: S-8820/8840/9220/9260/9300/9380,The power supply has built-in V1/V2 voltage characteristic curve data corresponding to the CD-SEM model.
- High Voltage Output Cable: 2.2m shielded high-voltage cable, 5-core high-voltage and separate ground wire, with PVC sheath
- High Voltage Output Plug: Customized, consistent with the original HITACHI, 6-hole eccentric shielded plug, directly plugged into the CD-SEM tools’ electron-gun
- Weight(Excluding high-voltage cable): 6.5kg
- Dimensions: D X W X H(mm):435X230X165
INTERNAL HV MODULES
The power supply is internally equipped with a high-precision and high-stability high-voltage module, made in Germany.
HIGH VOLTAGE OUTPUT CABLE & PLUG
HV cable and plug assembly for high voltage power supply used in HITACHI CDSEM tools, can be used for all HITACHI CD-SEM S-8820, S-8840, S-9220, S-9260, S9300, S-9380 series tools.
- This is our newly developed special high-voltage cable, which uses a new generation of silicone dielectric shielded high-voltage cable.
- Very flexible 10kVDC shielded high voltage cable for high voltage applications at high temperatures up to 180°C, made in Germany.
- The construction is based on a silver plated fine stranded conductor, Silicone dielectric, silver plated fine stranded shield braid and a Silicone jacket.
- Conductor Resistance @ 20°C : ≤ 40Ω/km
- A high-voltage plug with the same size as the original HITACHI's, as well as same interlock (link) connectors.
- The outer layer has a second shielding layer.
Download
Application videos (on Youtube)