OVERVIEW
A capacitive sensor board based on a new generation of polyester material that is directly used to replace the original AMAT blade sensor board with type 0100-09019.
KEY FEATURES
- The same output interface, high temperature resistance, provides stable sensing capacitance value.
- The preamplifier board with type N.o 0130-00084 is also available.
MODEL
ADSS-0100-0901
APPLICATIONS
AMAT P5000
Contact
*Note:Brands and trademarks such as LAM Research, Applied Materials, Novellus, Kla-Tencor, Hitachi, Nikon, Gasonics, TEL, Axcelis, Fusion, ASML belong to OEMs.
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ADsemtech electronics GmbH
Hammfelddamm 4a
41460 Neuss
Germany
www.adsemtech.de