OVERVIEW
HV cable and plug assembly for high voltage power supply used in HITACHI CDSEM tools, can be used for all HITACHI S-8800,S-9200 and S9300 series CD-SEM tools.
KEY FEATURES
- This is our newly developed special high-voltage cable, which uses a new generation of silicone dielectric shielded high-voltage cable.
- Very flexible 10kVDC shielded high voltage cable for high voltage applications at high temperatures up to 180°C.
- The construction is based on a silver plated fine stranded conductor, Silicone dielectric, silver plated fine stranded shield braid and a Silicone jacket.
- Conductor Resistance @ 20°C : ≤ 40Ω/km
- A high-voltage plug with the same size as the original HITACHI's, as well as same interlock(link) connectors.
- The outer layer has a second shielding layer.
Model
ADSHC-5FP
APPLICATIONS
All HITACHI S-8800,S-9200,S-9300 CD-SEM series tools.
Contact
*Note:Brands and trademarks such as LAM Research, Applied Materials, Novellus, Kla-Tencor, Hitachi, Nikon, Gasonics, TEL, Axcelis, Fusion, ASML belong to OEMs.
Copyright (c) 2023 ADsemtech electronics GmbH | All rights reserved
ADsemtech electronics GmbH
Hammfelddamm 4a
41460 Neuss
Germany
www.adsemtech.de