KEY FEATURES & HIGHLIGHTS
- ADSP-HV80 power supply is a high-precision, high-stability, low-temperature drift, multi-channel high-voltage output, and a high-voltage power supply with filament heating driver specially designed for the drive of HITACHI CD-SEM scanning electron microscope electron gun.
- The ADSP-HV80 power supply has the same power input interface, LINK interface, serial communication interface and communication protocol, high-voltage output interface, high-voltage cable and high-voltage plug as the original HVPS. It can be directly used to replace all models of HITACHI’s original CD-SEM dedicated HVPS without any modification.
- We use a new design concept and adopt a new generation of high-precision, compact modular high-voltage unit, which makes the ADSP-HV80 high-voltage power supply reduced by a quarter of the volume and half of the weight compared to Hitachi's original HVPS. The power consumption and heat generation of this unit have been drastically reduced by about 40%.
- More importantly, we designed the new HVPS with a wider high-voltage output range, and built-in a variety of HITACHI original HVPS models of V1/V2 characteristic curve library, the user only needs to set one parameter to change The high-voltage output value range and characteristics of the HVPS, then it can be applied to all different types of HITACHI CD-SEM machines, such as S-8820, S-8840, S-9200, S-9220, S-9260, S-9300, S- 9380 and other models.
APPLICATIONS
All HITACHI CD-SEM S-8800 S-9200 S-9300 series tools, including S-8820,S-8840,S-9200,S-9220,S-9260,S-9300,S-9380
High-precision, high-stability high-voltage power supply for driving electron gun, used to directly replace the expensive dedicated high-voltage power supply unit used in HITACHI CD-SEM tools.
OVERVIEW
SPECIFICATIONS
DIMENSIONS
Model
Input Voltage
Power Input Interface
High Voltage Outputs
HV Outputs Accuracy
HV Outputs Ripple
HV Outputs Temperature Coefficient
HV Outputs Protection
Filament
Accuracy of Filament Current
Communication Interface
Communication Protocol
Data Displayed
Protections
Supported HITACHI CD-SEM tool models
High Voltage Output Cable
High Voltage Output Plug
Weight(Excluding high-voltage cable)
Dimensions
ADSP-HV80
AC85-265V，1Φ，+15%/-20%, 50/60Hz
Three-pin plug, the same as the original HITACHI
V0：0- -3KV，1000μA Max
V1：0- +3KV，1000μA Max
V2：0- +6KV，670μA Max
Vs：0- -4KV，1000μA Max
After warm-up,<±0.02% of settings
<30MV (p-p)
<0.01%/℃
Overload and short circuit protected
DC 0-3A，Constant current Mode
After warm-up,<±0.2% of settings
Optical isolation serial RS232，DB25F
HITACHI CD-SEM customized, compatible with Hitachi S8800/9200/9300 series models of CD-SEM tools
V0,V1,V2,VS,IF,Ie values
IP RANGE,IP CONTROL Instruction execution status
Key locked
Outputs start and stop
Ie and If over current，vacuum error
The setting corresponds to the model information of HITACHI CD-SEM tools
Filament heating time accumulation (hours)
If over current more than 3A
Ie over current more than 511μA
Vacuum error
S-8820/8840/9200/9220/9300/9380，The power supply has built-in V1/V2 voltage characteristic curve data corresponding to the CD-SEM model.
2.2m shielded high-voltage cable, 5-core high-voltage and separate ground wire, with PVC sheath
Customized, consistent with the original HITACHI, 6-hole eccentric shielded plug, directly plugged into the CD-SEM tools’ electron-gun
6.5kg
D X W X H（mm）：435X230X165
Contact
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ADsemtech electronics GmbH
Hammfelddamm 4a
41460 Neuss
Germany
www.adsemtech.de