ADsemtech electronics GmbH | R&D of Semiconductor Equipment Parts

OVERVIEW

32 IN 1 multi-unit recipe module for Lam research AUTOETCH 490/590 tools, the best replacement of original single recipe module. One module can provide 32 process recipe storage units, no longer need to replace as frequently as the original EEPROM(XC2816 etc) single process recipe storage.

KEY FEATURES & HIGHLIGHTS

All new developed new generation Lam490/590 autoetch tool multi-unit process recipe module.
The module can store 32 recipe files in a single module, equivalent to 32 original EEPROM(based on XC2816 chip or others) process modules, which can save a lot of module cost compared with the single recipe module of the original tool.
The selection of 32 units of recipe is selected by two buttons. LCD module can display recipe name, name can be edited at will, convenient for users and the original module of the process name consistency.
Fully compatible with the original module, directly plugged into the interface slot on the tool.
Using battery backup non-volatile memory technology, there is no longer the damage caused by the frequent plugging of module.
Effectively avoid the frequent plugging of modules on the module and tool damage caused.
Data can be effectively maintained in 10 years, maturing replaceable batteries, eliminating the need to replace dedicated, hard-to-buy memory chips.
Each recipe has 16 editable process name characters, including all characters in the standard PC keyboard, which makes it easy to edit recipe name.
With recipe name editing software, based on Windows operating system, USB interface, can modify the recipe name offline.
With simple use, the load and save operation methods used in the original tool do not need to be changed.

MODEL

ADSRM-32U

APPLICATIONS

Special for Lam research AUTOETCH 490/590 tools