Specifications & operating manual
English · 31 pages · PDF · 1.3 MB
Download manual ↓ELECTRON GUN POWER SUPPLY
ADSP-HV80+
ADSP-HV80+ — a multi-channel high-voltage power supply with filament drive for selected HITACHI CD-SEM systems.
< ±0.02%Output accuracyAfter warm-up, relative to setting
<40 mVOutput ripplePeak-to-peak
0–2.85 AFilament driveConstant-current output
Technical specifications
Source: manual V2609E07, with manufacturer-confirmed corrections.
V00 → −3 kV1,000 μA max.
V10 → +2 kV1,000 μA max.
V20 → +4.68 kV670 μA max.
Vs0 → −3.7 kV1,000 μA max.
| AC input | 100–230 V AC · 1 phase · 50/60 Hz · 40 W |
|---|---|
| HV output accuracy | < ±0.02% of setting, after warm-up |
| HV output ripple | < 40 mV (p-p) |
| Filament drive | 0–2.85 A DC · constant current |
| Dimensions (D × W × H) | 435 × 230 × 165 mm |
| Weight | Approx. 6.5 kg unit / approx. 8.3 kg including HV cable and connector |
All specifications
| Temperature coefficient | < 0.01% / °C |
|---|---|
| Filament current accuracy | < ±0.2% of setting, after warm-up |
| Communication | RS-232 · DB25F · optically isolated |
| Protection | Overload, short circuit, vacuum interlock; If > 3 A; Ie > 511 μA |
| HV cable | 2.2 m · shielded · five HV wires plus separate ground wire |
| Cable construction | PVC outer sheath around the harness; silicone outer jacket on each of the five individual HV wires |
| Operating conditions | Indoor use · 15–30 °C · 35–50% RH, non-condensing |
| Enclosure protection | IP20 |
| Cooling | Forced air; minimum 50 mm clearance on both sides and above recommended |
Compatible systems
Built-in V1/V2 characteristic curves support the following equipment models. Tell us your tool model and existing HV unit part number so we can confirm the required configuration.
S-8820S-8840S-9220S-9260S-9300S-9380CG4000*
* CG4000 requires a separate software upgrade package.
Interfaces & integration
Optically isolated RS-232 (DB25F), vacuum interlock LINK and a dedicated high-voltage connector. The AC input connection depends on the tool series; an adapter cable is provided for S-92XX and S-93XX.
Replacement applications listed in the manual
567-5101 · 560-6590 · 569-6592
Manual & videos
Application videos
Applications and demonstrations on our YouTube channel. Links open YouTube in a new tab; no YouTube content is loaded on this page.
View application videos ↗View short videos ↗
About ADsemtech
ADsemtech electronics GmbH · Dresden, Germany
Founded in 2018, ADsemtech electronics GmbH specialises in the development of upgrade and replacement components for legacy semiconductor equipment, as well as component refurbishment and repair services.
Our core technical team has more than 25 years of experience in this field.
Technical inquiry
Tell us your tool model, existing HV unit part number and requirements.
sales@adsemtech.deADsemtech electronics GmbHNanoelektronik Zentrum Dresden
Maria-Reiche-Straße 1
01109 Dresden · Germany
For professional use. Installation by qualified personnel only. Read the manual and observe the specified operating conditions.